PECVD hydrogenated amorphous carbon films : growth and characterization /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2008.
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| Subjects: | |
| Online Access: | http://dspace.fsktm.um.edu.my/handle/1812/599 |
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| Physical Description: | xx, 184 leaves : ill. ; 30 cm. |
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| Bibliography: | Bibliography: leaves 163-174. |