PECVD hydrogenated amorphous carbon films : growth and characterization /

PECVD hydrogenated amorphous carbon films : growth and characterization /

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書目詳細資料
主要作者:	Rozidawati Awang
格式:	Thesis 圖書
語言:	English
出版:	2008.
主題:	Amorphous semiconductors. Carbon compounds. Thin films. Plasma-enhanced chemical vapor deposition.
在線閱讀:	http://dspace.fsktm.um.edu.my/handle/1812/599
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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