PZT driven silicon XY microstage for multiprobe data storage /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2009.
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| Subjects: | |
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| LEADER | 01098cam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | u786090 | ||
| 003 | SIRSI | ||
| 005 | 201002031628 | ||
| 008 | 090114s2009 ja a v 000 0 eng m | ||
| 040 | |a UMM | ||
| 090 | |a TK7872 |b P54Mohfms | ||
| 100 | 0 | |a Mohd Faizul Mohd Sabri. | |
| 245 | 1 | 0 | |a PZT driven silicon XY microstage for multiprobe data storage / |c Mohd Faizul Mohd Sabri. |
| 260 | |c 2009. | ||
| 270 | 1 | |g Mohd Faizul Mohd Sabri. |a Universiti Malaya. Fakulti Kejuruteraan. Jabatan Kejuruteraan Mekanik. | |
| 300 | |a v, 207 p. : |b ill. ; |c 30 cm. | ||
| 500 | |a Cover title. | ||
| 502 | |a Thesis (Ph.D.) -- Graduate School of Engineering, Tohoku University, 2009. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Piezoelectric devices |x Materials. | |
| 650 | 0 | |a Nanotechnology |x Materials. | |
| 650 | 0 | |a Microactuators |x Materials. | |
| 650 | 0 | |a Electromechanical devices. | |
| 650 | 0 | |a Microelectronics. | |
| 710 | 2 | |a Tohoku Daigaku. | |
| 900 | |a SJMK-ZA | ||
| 596 | |a 1 | ||
| 999 | |a TK7872 P54MOHFMS |w LC |c 1 |i A513777415 |d 5/1/2011 |f 5/1/2011 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 4/1/2011 | ||