Lim, W. H. (2010). Optimization of inductively coupled plasma dry etching for planar waveguide fabrication.
Chicago Style (17th ed.) CitationLim, Weng Hong. Optimization of Inductively Coupled Plasma Dry Etching for Planar Waveguide Fabrication. 2010.
MLA (8th ed.) CitationLim, Weng Hong. Optimization of Inductively Coupled Plasma Dry Etching for Planar Waveguide Fabrication. 2010.
Warning: These citations may not always be 100% accurate.