Optimization of inductively coupled plasma dry etching for planar waveguide fabrication /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2010.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/4307 |
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| 003 | SIRSI | ||
| 005 | 201008240941 | ||
| 008 | 100824s2010 my a t 000 0 eng m | ||
| 040 | |a UMM |d AUM |e rda | ||
| 090 | |a QC3 |b UM 2010 Lim | ||
| 100 | 1 | |a Lim, Weng Hong. | |
| 245 | 1 | 0 | |a Optimization of inductively coupled plasma dry etching for planar waveguide fabrication / |c Lim Weng Hong. |
| 260 | |c 2010. | ||
| 300 | |a xvi, 140 leaves : |b col. ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2010. | ||
| 504 | |a Bibliography: leaves 140. | ||
| 650 | 0 | |a Plasma etching. | |
| 650 | 0 | |a Mathematical optimization. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/4307 |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik. | |
| 900 | |a HA-ZA | ||
| 596 | |a 1 25 | ||
| 999 | |a QC3 UM 2010 LIM |w LC |c 1 |i A514477200 |d 17/6/2011 |f 17/6/2011 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 17/6/2011 | ||
| 999 | |a QC3 UM 2010 LIM |w LC |c 1 |i A516260126 |l STACKS |m P25UMARCHI |r Y |s Y |t CD |u 9/7/2015 |1 STEM | ||