Optimization of inductively coupled plasma dry etching for planar waveguide fabrication /

Optimization of inductively coupled plasma dry etching for planar waveguide fabrication /

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書目詳細資料
主要作者:	Lim, Weng Hong
格式:	Thesis 圖書
語言:	English
出版:	2010.
主題:	Plasma etching. Mathematical optimization.
在線閱讀:	http://studentsrepo.um.edu.my/id/eprint/4307
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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