Optimization of inductively coupled plasma dry etching for planar waveguide fabrication /

Optimization of inductively coupled plasma dry etching for planar waveguide fabrication /

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书目详细资料
主要作者:	Lim, Weng Hong
格式:	Thesis 图书
语言:	English
出版:	2010.
主题:	Plasma etching. Mathematical optimization.
在线阅读:	http://studentsrepo.um.edu.my/id/eprint/4307
标签:	添加标签没有标签, 成为第一个标记此记录!

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