Characterization of an inductively coupled plasma produced in argon at 13.56 MHz /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2010.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/4309 |
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| Physical Description: | xiv, 105 leaves : ill. ; 30 cm. |
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| Bibliography: | Bibliography: leaves 102-105. |