Characterization of an inductively coupled plasma produced in argon at 13.56 MHz /

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Bibliographic Details
Main Author: Lim, Ai Nuan
Format: Thesis Book
Language:English
Published: 2010.
Subjects:
Online Access:http://studentsrepo.um.edu.my/id/eprint/4309
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100 1 |a Lim, Ai Nuan. 
245 1 0 |a Characterization of an inductively coupled plasma produced in argon at 13.56 MHz /  |c Lim Ai Nuan. 
260 |c 2010. 
300 |a xiv, 105 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2010. 
504 |a Bibliography: leaves 102-105. 
650 0 |a Inductively coupled plasma mass spectrometry 
650 0 |a Argon plasmas. 
650 0 |a Plasma probes. 
650 0 |a Plasma frequencies. 
650 0 |a Langmuir probes. 
710 2 |a Universiti Malaya.  |b Jabatan Fizik. 
856 4 1 |u http://studentsrepo.um.edu.my/id/eprint/4309 
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