Chuah, K. S. (2010). Inductively coupled plasma dry etching process on planar lightwave circuit fabrication.
Chicago Style (17th ed.) CitationChuah, Khoon Seah. Inductively Coupled Plasma Dry Etching Process on Planar Lightwave Circuit Fabrication. 2010.
MLA (8th ed.) CitationChuah, Khoon Seah. Inductively Coupled Plasma Dry Etching Process on Planar Lightwave Circuit Fabrication. 2010.
Warning: These citations may not always be 100% accurate.