Inductively coupled plasma dry etching process on planar lightwave circuit fabrication /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2010.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/4273 |
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| Physical Description: | x, 199 leaves : ill. ; 30 cm. |
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