Effects of substrate bias voltage on the properties of amorphous hydrogenated carbon nitride thin films /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2010.
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| Subjects: | |
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| Physical Description: | [1] x, 84 leaves : ill. ; 30 cm. |
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| Bibliography: | Bibliography: leaves 78-84. |