Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films /

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Bibliographic Details
Main Author: Goh, Boon Tong
Format: Thesis Book
Language:English
Published: 2012.
Subjects:
Online Access:http://studentsrepo.um.edu.my/id/eprint/3875
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Description
Physical Description:[2] xx, 201 leaves : ill. ; 30 cm.
Bibliography:Bibliography: leaves 188-201.