Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2012.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/3875 |
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|---|---|---|---|
| 001 | u853620 | ||
| 003 | SIRSI | ||
| 005 | 201203221211 | ||
| 008 | 120322s2012 my a t 000 0 eng m | ||
| 040 | |a UMM |d AUM | ||
| 090 | |a QC3 |b UMP 2012 Goh | ||
| 100 | 1 | |a Goh, Boon Tong. | |
| 245 | 1 | 0 | |a Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films / |c Goh Boon Tong. |
| 260 | |c 2012. | ||
| 300 | |a [2] xx, 201 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2012. | ||
| 504 | |a Bibliography: leaves 188-201. | ||
| 596 | |a 1 25 | ||
| 650 | 0 | |a Thin films |x Design and construction. | |
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition. | |
| 650 | 0 | |a Silicon crystals. | |
| 650 | 0 | |a Thin films |x Optical properties. | |
| 650 | 0 | |a Semiconductor films |x Design and construction. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik. |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/3875 |
| 900 | |a ZA | ||
| 999 | |a QC3 UMP 2012 GOH |w LC |c 1 |i A515057481 |d 24/5/2016 |e 24/5/2016 |f 25/1/2013 |g 1 |l STACKS |m P01UTAMA |n 2 |r Y |s Y |t TESIS |u 25/1/2013 | ||
| 999 | |a QC3 UMP 2012 GOH |w LC |c 1 |i A515559554 |l STACKS |m P25UMARCHI |r Y |s Y |t CD |u 28/3/2017 |1 STEM |2 GIFT | ||