Semiconductor equipment jam rate improvement by using computational fluid dynamics /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2010.
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| LEADER | 01139cam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | u853732 | ||
| 003 | SIRSI | ||
| 005 | 201203271003 | ||
| 008 | 120327s2010 my a t 000 0 eng m | ||
| 040 | |a UMM |d UMJ | ||
| 090 | |a TS176 |b UM 2010 Che | ||
| 097 | |a TS176 |b UM 2010 Che | ||
| 100 | 1 | |a Chee, Wai Koon. | |
| 245 | 1 | 0 | |a Semiconductor equipment jam rate improvement by using computational fluid dynamics / |c Chee Wai Koon. |
| 260 | |c 2010. | ||
| 300 | |a ix, 83 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng. (Manuf.)) -- Jabatan Kejuruteraan Rekabentuk dan Pembuatan, Fakulti Kejuruteraan, Universiti Malaya, 2010. | ||
| 504 | |a Bibliography: leaves 81-83. | ||
| 650 | 0 | |a Semiconductors |x Design and construction. | |
| 650 | 0 | |a Fluid dynamics. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Kejuruteraan Rekabentuk dan Pembuatan. | |
| 900 | |a AT | ||
| 902 | |a 090-1 copy in process. | ||
| 596 | |a 1 7 | ||
| 999 | |a TS176 UM 2010 CHE |w LC |c 1 |i A514901754 |d 12/12/2012 |f 12/12/2012 |g 1 |l STACKS |m P07JURUTER |r Y |s Y |t TESIS |u 5/12/2012 | ||
| 999 | |a TS176 UM 2010 CHE |w LC |c 1 |i A513412556 |d 6/1/2014 |f 6/1/2014 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 6/1/2014 | ||