Hot-wire plasma enhanced chemical vapour deposition system for preparation of silicon carbide thin films /

Hot-wire plasma enhanced chemical vapour deposition system for preparation of silicon carbide thin films /

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書目詳細資料
主要作者:	Aniszawati Azis
格式:	Thesis 圖書
語言:	English
出版:	2012.
主題:	Silicon-carbide thin films. Plasma-enhanced chemical vapor deposition. Chemical vapor deposition.
在線閱讀:	http://studentsrepo.um.edu.my/id/eprint/3841
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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