Modeling and simulation of metal organic halide vapor phase epitaxy growth chamber reactor /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2013.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/8652. |
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| 001 | u888367 | ||
| 003 | SIRSI | ||
| 005 | 201309191625 | ||
| 008 | 130919s2013 my a m 000 0 eng m | ||
| 040 | |a UMM |d UMJ |d AUM |e rda | ||
| 090 | |a TA7 |b UM 2013 Nurzma | ||
| 097 | |a TA7 |b UM 2013 Nurzma | ||
| 100 | 0 | |a Nurul Zieyana Mohamed Annuar, |e author. | |
| 245 | 1 | 0 | |a Modeling and simulation of metal organic halide vapor phase epitaxy growth chamber reactor / |c Nurul Zieyana bt Mohamed Annuar. |
| 264 | 1 | |c 2013. | |
| 300 | |a ix, 88 leaves : |b illustrations ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b M.Eng.Sc. |c Jabatan Kejuruteraan Awam, Fakulti Kejuruteraan, Universiti Malaya |d 2013. | ||
| 504 | |a Bibliography: leaves 79-82. | ||
| 650 | 0 | |a Semiconductors |x Research. | |
| 650 | 0 | |a Metal organic chemical vapor deposition. | |
| 650 | 0 | |a Thin films. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Kejuruteraan Awam, |e degree granting institution. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/8652. |
| 900 | |a AT-ZA | ||
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