Hybrid Plasma Enhanced Chemical Vapour Deposition/sputtering system for preparation of luminescent silicon carbon films /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2013.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/4414 |
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| 001 | u988264 | ||
| 003 | SIRSI | ||
| 005 | 201401271139 | ||
| 008 | 140127s2013 my a t 000 0 eng m | ||
| 040 | |a UMM |d AUM |e rda | ||
| 090 | |a QC3 |b UM 2013 Nurmar | ||
| 100 | 0 | |a Nur Maisarah Abdul Rashid. | |
| 245 | 1 | 0 | |a Hybrid Plasma Enhanced Chemical Vapour Deposition/sputtering system for preparation of luminescent silicon carbon films / |c Nur Maisarah binti Abdul Rashid. |
| 260 | |c 2013. | ||
| 300 | |a xv, 109 leaves : |b ill. ; |c 30 cm | ||
| 502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2013. | ||
| 504 | |a Bibliography: leaves 102-109 | ||
| 530 | |a Also issued in CD. | ||
| 650 | 0 | |a Sputtering (Physics). | |
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition. | |
| 650 | 0 | |a Thin films |x Design and construction | |
| 650 | 0 | |a Thin films |x Surfaces |x Analysis. | |
| 650 | 0 | |a Thin films |x Optical properties. | |
| 650 | 0 | |a Thin films |x Materials. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/4414 |
| 900 | |a ZA | ||
| 596 | |a 1 25 | ||
| 999 | |a QC3 UM 2013 NURMAR |w LC |c 1 |i A515702485 |d 18/12/2014 |f 18/12/2014 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 17/12/2014 | ||
| 999 | |a QC3 UM 2013 NURMAR |w LC |c 1 |i A515869406 |f 19/2/2021 |g 1 |l STACKS |m P25UMARCHI |r N |s Y |t CD |u 29/7/2015 |1 STEM |o .STAFF. MST-CD120 | ||