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Hydrogenated amorphous silicon prepared by d.c. plasma enhanced chemical vapour deposition of helium diluted silane /
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Roszairi Haron
Published 2004
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Hydrogenated amorphous silicon by pulsed plasma enhanced chemical vapour deposition technique /
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Goh, Boon Tong
Published 2005
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Effect of annealing on direct current and pulse PECVD hydrogenated amorphous silicon /
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Lim, Seck Chai
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Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /
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Mitani, Sufian Mousa Ibrahim
Published 2004
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PECVD hydrogenated amorphous carbon films : growth and characterization /
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Rozidawati Awang
Published 2008
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Institution
Universiti Malaya
5
Collection
Catalog
5
Author
Goh, Boon Tong
1
Lim, Seck Chai
1
Mitani, Sufian Mousa Ibrahim
1
Roszairi Haron
1
Rozidawati Awang
1
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Universiti Malaya.
5
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