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  1. 1
    Characterization of an inductively coupled plasma produced in argon at 13.56 MHz /
    by Lim, Ai Nuan
    Published 2010
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    Thesis Book
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  2. 2
    Langmuir probe measurement in a radio frequency inductively coupled argon plasma /
    by Ong, Chun Lian
    Published 2003
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