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  1. 1
    High aspect ratio microfilling for MEMS using metal nanopowder /
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    Thesis Book
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  2. 2
    Electrostatic comb drive for resonant sensor and actuator applications /
    by Tang, William Chi-Keung
    Published 1990
    Thesis Book
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  3. 3
    Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /
    by Muhammad Ramdzan Buyong
    Published 2010
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  4. 4
    Modelling and simulation of microaccelerometer /
    by Yao, Yufeng
    Published 1999
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  5. 5
    PZT driven silicon XY microstage for multiprobe data storage /
    by Mohd Faizul Mohd Sabri
    Published 2009
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