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Characterization of an inductively coupled plasma produced in argon at 13.56 MHz /
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Lim, Ai Nuan
Published 2010
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Electrical characteristics of a direct current glow discharge system /
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Siti Sarah Safaai
Published 2009
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Langmuir probe measurement in a radio frequency inductively coupled argon plasma /
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Ong, Chun Lian
Published 2003
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Influence of RF power and hidrogen dilution on the optical and structural properties of hydrogenated silicon thin films deposited by RF plasma enhanced chemical vapour deposition /
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Shi, Chee Han
Published 2008
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Physical properties of hydrogenated silicon (Si:H) thin films : the effect of RF power during deposition /
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Ramlee Adnan
Published 2008
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Institution
Universiti Malaya
5
Collection
Catalog
5
Author
Lim, Ai Nuan
1
Ong, Chun Lian
1
Ramlee Adnan
1
Shi, Chee Han
1
Siti Sarah Safaai
1
Granting Institution
Universiti Malaya.
5
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English
4
Malay
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