Design and modelling of integrated RF MEMS beam resonators /
Recently, there has been interest to design the MicroElectroMechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the analytical, simulation and measurement of clamped-clamped and clamped-free beam resonators....
محفوظ في:
| المؤلف الرئيسي: | |
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| التنسيق: | أطروحة |
| اللغة: | English |
| منشور في: |
Kuala Lumpur :
Kulliyyah of Engineering, International Islamic University Malaysia,
2014
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| الموضوعات: | |
| الوصول للمادة أونلاين: | Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library. |
| الوسوم: |
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