Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer

In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.

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Bibliographic Details
Main Author: Choong, Chwee Lin
Format: Thesis
Published: 2006
Subjects:
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