Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer

In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.

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Main Author: Choong, Chwee Lin
Format: Thesis
Published: 2006
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spelling my-mmu-ep.11192010-08-23T03:51:31Z Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer 2006-05 Choong, Chwee Lin TK7800-8360 Electronics In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations. 2006-05 Thesis http://shdl.mmu.edu.my/1119/ http://myto.perpun.net.my/metoalogin/logina.php masters Multimedia University Research Library
institution Multimedia University
collection MMU Institutional Repository
topic TK7800-8360 Electronics
spellingShingle TK7800-8360 Electronics
Choong, Chwee Lin
Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
description In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.
format Thesis
qualification_level Master's degree
author Choong, Chwee Lin
author_facet Choong, Chwee Lin
author_sort Choong, Chwee Lin
title Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_short Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_full Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_fullStr Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_full_unstemmed Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_sort effect of temperature and electric field on polysilicon gettering of copper impurities in silicon wafer
granting_institution Multimedia University
granting_department Research Library
publishDate 2006
_version_ 1747829295373352960