Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer

Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer

In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.

Saved in:
Bibliographic Details
Main Author: Choong, Chwee Lin
Format: Thesis
Published: 2006
Subjects:
TK7800-8360 Electronics
Tags: Add Tag
No Tags, Be the first to tag this record!
id my-mmu-ep.1119
record_format uketd_dc
spelling my-mmu-ep.11192010-08-23T03:51:31Z Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer 2006-05 Choong, Chwee Lin TK7800-8360 Electronics In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations. 2006-05 Thesis http://shdl.mmu.edu.my/1119/ http://myto.perpun.net.my/metoalogin/logina.php masters Multimedia University Research Library
institution Multimedia University
collection MMU Institutional Repository
topic TK7800-8360 Electronics
spellingShingle TK7800-8360 Electronics
Choong, Chwee Lin
Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
description In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.
format Thesis
qualification_level Master's degree
author Choong, Chwee Lin
author_facet Choong, Chwee Lin
author_sort Choong, Chwee Lin
title Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_short Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_full Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_fullStr Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_full_unstemmed Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
title_sort effect of temperature and electric field on polysilicon gettering of copper impurities in silicon wafer
granting_institution Multimedia University
granting_department Research Library
publishDate 2006
_version_ 1747829295373352960

Similar Items