Characterization of nanostructured zinc oxide thin films for ammonia gas sensor / Samsiah Ahmad

This research is carried out to deposit and characterizes nanostructured Zinc Oxide (ZnO) thin film by radio frequency (RF) magnetron sputtering method for ammonia (NH3) gas sensor application. The sensitivity of sensor is mainly depends on the surface reaction effect which strongly depends on the g...

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主要作者: Ahmad, Samsiah
格式: Thesis
語言:English
出版: 2013
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在線閱讀:https://ir.uitm.edu.my/id/eprint/48557/1/48557.pdf
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