Neural Network Based Pattern Recognition in Visual Inspection System for Intergrated Circuit Mark Inspection
Industrial visual machine inspection system uses template or feature matching methods to locate or inspect parts or pattern on parts. These algorithms could not compensate for the change or variation on the inspected parts dynamically. Such problem was faced by a multinational semiconductor manuf...
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Format: | Thesis |
Language: | English English |
Published: |
1998
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Online Access: | http://psasir.upm.edu.my/id/eprint/10131/1/FK_1998_8_A.pdf |
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