Fabrication And Characterization Of O.5-Um Mosfet Bulk Silicon Technology On Thick Bonded Silicon-On-Insulator Substrate
The effect of thick film Silicon-On-Insulator (SOl) substrate on device fabrication and performance is studied. Enhancement-type Partially-Depleted SOl MOS device is fabricated on bonded SOl (BSOI) substrate based on bulk silicon MIMOS 0.5 um CMOS technology with full compatibility maintained. Th...
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| Format: | Thesis |
| Language: | English English |
| Published: |
2003
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| Subjects: | |
| Online Access: | http://psasir.upm.edu.my/id/eprint/12153/1/FK_2003_12_A.pdf |
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