Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling a...
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| 主要作者: | |
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| 格式: | Thesis |
| 語言: | English |
| 出版: |
2013
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| 主題: | |
| 在線閱讀: | http://eprints.usm.my/46067/1/Muhammad%20Syakir%20Bin%20Harun.pdf |
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