Structural and optical properties of carbon nanowalls by plasma-enhanced chemical vapor deposition method

Vertically aligned carbon nanowalls (CNWs) were synthesized by catalyst-free 150 MHz high frequency plasma enhanced chemical vapor deposition (PECVD) system, where methane and hydrogen gases were used as the reactive gases. Parametric studies were done to determine the optimum parameters required to...

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Bibliographic Details
Main Author: Subari, Noor Fariza
Format: Thesis
Language:English
Published: 2015
Subjects:
Online Access:http://eprints.utm.my/id/eprint/81541/1/NoorFarizaSubariMFS2015.pdf
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