Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /

مواد مشابهة

• Hydrogenated silicon nitride alloy from DC plasma decomposition : preparation and physical properties /
  بواسطة: Raihan Othman
  منشور في: (1998)
• Hot-wire plasma enhanced chemical vapour deposition system for preparation of silicon carbide thin films /
  بواسطة: Aniszawati Azis
  منشور في: (2012)
• Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /
  بواسطة: Mitani, Sufian Mousa Ibrahim
  منشور في: (2004)
• Effects of hydrogen dilution of silane on the optical and photoluminescence properties of hydrogenated nanocrystalline silicon thin films /
  بواسطة: Tang, Show Yih
  منشور في: (2008)
• Plasma enhanced chemical vapour deposition of carbon nitride films from ethane and nitrogen gas mixtures /
  بواسطة: Maisara Othman
  منشور في: (2012)