Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /

Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /

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书目详细资料
主要作者:	Faidz Abd. Rahman
格式:	Thesis 图书
语言:	English
出版:	1996.
主题:	Plasma-enhanced chemical vapor deposition. Thin films. Silicon alloys.
标签:	添加标签没有标签, 成为第一个标记此记录!

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