Surface modification of Si, GaAs and and InP by 1-10 keV Ar+ and N2+ ion bombardment /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
1997.
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|