Surface modification of Si, GaAs and and InP by 1-10 keV Ar+ and N2+ ion bombardment /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1997.
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| Subjects: | |
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| Physical Description: | xi, 214 leaves : ill. ; 30 cm. |
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| Bibliography: | Includes bibliographical references. |