Effects of annealing on the structural properties of R.F. sputtered amorphous silicon carbide films /

Effects of annealing on the structural properties of R.F. sputtered amorphous silicon carbide films /

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书目详细资料
主要作者:	Ong, Tiong Yew
格式:	Thesis 图书
语言:	English
出版:	1998.
主题:	Silicon-carbide thin films > Effects of rapid thermal processing on Semiconductors > Heat treatment
标签:	添加标签没有标签, 成为第一个标记此记录!

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