Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
|
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/2891 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|