Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
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| Online Access: | http://studentsrepo.um.edu.my/id/eprint/2891 |
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| Physical Description: | iii, 102 leaves : ill. ; 29 cm. |
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| Bibliography: | Includes bibliographical references. |