Techniques and materials for diffraction-enhanced x-ray lithography /
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| 主要作者: | |
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| 格式: | Thesis 图书 |
| 语言: | English |
| 出版: |
2002.
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| 标签: |
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| 实物描述: | xiii, 120, [4] leaves : ill. ; 30 cm. |
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| 参考书目: | Includes bibliographical references. |