Hybrid Plasma Enhanced Chemical Vapour Deposition/sputtering system for preparation of luminescent silicon carbon films /

Hybrid Plasma Enhanced Chemical Vapour Deposition/sputtering system for preparation of luminescent silicon carbon films /

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书目详细资料
主要作者:	Nur Maisarah Abdul Rashid
格式:	Thesis 图书
语言:	English
出版:	2013.
主题:	Sputtering (Physics). Plasma-enhanced chemical vapor deposition. Thin films > Design and construction Thin films > Surfaces > Analysis. Thin films > Optical properties. Thin films > Materials.
在线阅读:	http://studentsrepo.um.edu.my/id/eprint/4414
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